Quartz glass gas diffusion and permeability of voids have many irregular quartz glass network structure because, many gas may be the diffusion and permeation characteristics of gas atoms is of relatively small diameter such as helium, neon and hydrogen in quartz glass permeability is relatively large, while the nitrogen and oxygen atoms is relatively large, gas the activity is relatively small, even at the temperature of 600-700oC, diffusion in quartz glass is low, so it can be used for the operation of quartz glass ware 10-5-10-6mmHg negative pressure and heating condition, available in high temperature vacuum equipment.
